Driving Plasma: Advancing Power Conversion in Critical Semi & Medical Applications - Gideon van Zyl - APEC

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Gideon (Don) van Zyl, Advanced Energy Industry, Fort Collins, CO, USA, presents his plenary talk about plasma processing, its power electronics engineering challenges, and its semiconductor industry role. 

Abstract: Plasma processing is well established and known in semiconductor wafer manufacturing and for creating highly engineered coatings in advanced industrial applications. The ability to precisely power and drive plasma loads has also enabled electrosurgical applications. For the power electronics engineer, plasma loads present unique challenges, including wide swings in load impedance, the highly nonlinear and time-varying nature of the load, arcing, and the difficulty in precisely measuring and controlling power delivery. In the semiconductor industry, higher etch rate requirements for 3D memory devices result in ever-increasing power being applied to bias the workpiece. This results in severe modulation of the plasma impedance creating problems for other generators that are also coupled to the plasma load. In medical applications, where a small plasma is created at the tip of a powered electrosurgical probe to cut and ablate tissue, challenging plasma impedance variations to create the same challenge for power delivery and control. We will show how advances in power electronics devices, circuits, and measurement and control are enabling advanced plasma processing.

 

Gideon (Don) van Zyl, Advanced Energy Industry, Fort Collins, CO, USA, presents his plenary talk about plasma processing, its power electronics engineering challenges, and its semiconductor industry role. 

Abstract: Plasma processing is well established and known in semiconductor wafer manufacturing and for creating highly engineered coatings in advanced industrial applications. The ability to precisely power...

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