Henry I. Smith accepts the IEEE Robert N. Noyce Medal - Honors Ceremony 2017

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  • #attenuated phaseshift masks
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Henry I. Smith, an IEEE Life Fellow and member of the U.S. National Academy of Engineering, is honored for contributions to lithography and nanopatterning for experimental devices in short-wavelength exposure systems and attenuated phase-shift masks. Smith’s work has been critical to the semiconductor industry, and has contributed five decades of inventions that were “well before their time”.

 

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  • Published on
  • June 4, 2017

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